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LAM Research 839-101612-065 ESC Electrostatic Chuck Assembly 710-251997-006
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$19,549.99
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Specifications
| Brand | Lam Research |
|---|---|
| Equipment/Component Type | Electrostatic Chuck |
| PCB also marked | 710-251997-006 Rev A |
| TYPE: | ESC, OVS, MZ, HTD CER, 300MM heated ceramic electrostatic chuck |
| MPN | 839-101612-065 , 710-251997-006 |
| Country of Origin | United States |